Semefab

Abstract: Pressure sensors are used in thousands of applications to directly measure pressure, and indirectly measure other parameters such as fluid levels, gas flow, speed and altitude. This paper provides an overview of MEMS pressure sensor technologies and fabrication techniques. Also are discussed emerging applications and fabrication trends such as the increased importance of MEMS device testing and reliability techniques. Whitepaper topics: MEMS pressure sensors, MEMS testing, capacitive pressure sensors, piezoresistive pressure sensors, MEMS reliability, bulk micromachining, surface micromachining, thin films, MEMS production outsourcing.